MEMS Microsystems

Lecture - 1 Introduction to MEMS & Microsystems.
Lecture - 2 Introduction to Microsensors.
Lecture - 3 Evoluation of MEMS, Microsensors, Market Survey.
Lecture - 4 Application of MEMS.
Lecture - 5 MEMS Materials.
Lecture - 6 MEMS Materials' Properties.
Lecture - 7 MEMS Materials Properties (Contd.).
Lecture - 8 Microelectronic Technology for MEMS - II.
Lecture - 9 Microelectronic Technology for MEMS - III.
Lecture - 10 Micromachining Technology for MEMS.
Lecture - 11 Micromachining Process.
Lecture - 12 Etch Stop Techniques and Microstructure.
Lecture - 13 Surface and Quartz Micromachining.
Lecture - 14 Fabrication of Micromachined Microstructure.
Lecture - 15 Microstereolithography.
Lecture - 16 MEMS Microsensors Thermal.
Lecture - 17 Micromachined Microsensors Mechanical.
Lecture - 18 MEMS Pressure and Flow Sensor.
Lecture - 19 Micromachined Flow Sensors.
Lecture - 20 MEMS Inertial Sensors.
Lecture - 21 Micromachined Microaccelerometers for MEMS.
Lecture - 22 MEMS Accelerometers for Avionics.
Lecture - 23 Temperature Drift and Damping Analysis.
Lecture - 24 Piezoresistive Accelerometer Technology.
Lecture - 25 MEMS Capacitive Accelerometer.
Lecture - 26 MEMS Capacitive Accelerometer Process.
Lecture - 27 MEMS Gyro Sensor.
Lecture - 28 MEMS for Space Application.
Lecture - 29 Polymer MEMS & Carbon Nano Tubes CNT.
Lecture - 30 Wafer Bonding & Packaging of MEMS.
Lecture - 31 Interface Electronics for MEMS.Lecture - 32 MEMS for Biomedical Applications (Bio-MEMS).